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Equipped with varisized wafer holders (including 4/6/8/12 inches), MX8R / MX12R is professionally applied for wafer and flat panel display detection, maximally supports for dia. 300mm of wafer and 17 inches of FPD. More comfortable, flexible and quicker operation is available with upgraded ergonomics design.

Realizes an automatic future:

• With electronic stage and nosepiece, X/Y/Z axis can be auto or manual positioned, while the aperture auto matched.
• With professional software for image capture and mosaic, overall image analysis is achievable.