Semiconductor FPD Inspection Microscope
Equipped with varisized wafer holders (including 4/6/8/12 inches), MX8R / MX12R is professionally applied for wafer and flat panel display detection, maximally supports for dia. 300mm of wafer and 17 inches of FPD. More comfortable, flexible and quicker operation is available with upgraded ergonomics design.
Realizes an automatic future:
- With electronic stage and nosepiece, X/Y/Z axis can be auto or manual positioned, while the aperture auto matched.
- With professional software for image capture and mosaic, overall image analysis is achievable.
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Multi optional splitting ratio:
- With broad beam image system MX8R maximum field of view of reaches to 26.5mm.
- Trinocular head with two optional splitting ratio Of 100:0 or 0: 100, 100% image outputs from eyepieces or camera.
- Trinocular head with three optional splitting ratio of 100:0 or 20180 or 0: 100, double way image output of 20% from eyepieces and 80% from camera is achievable.
Long travel mechanical stage:
- 8 inches three-layer mechanical stage, size: 525mmx330mm, moving range: 210mmx210mm, is professionally applied for industrial inspection of wafer, FPD, circuit package, PCB, materials, casting metal ceramic part, abrasive tools and so on.
- 6 inches stage for option, size: 445mmx 240mm, moving range: 158mmx158mm.
| GTIN | |
|---|---|
| Model | MX12R, MX8R |
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